Source: Journal of Non-Crystalline Solids. Unidades: IF, EP
Subjects: FILMES FINOS, NANOTECNOLOGIA, ESTRUTURA DOS MATERIAIS
ABNT
ESCOBAR FORHAN, Neisy Amparo e FANTINI, Márcia Carvalho de Abreu e PEREYRA, Inés. Nano-crystalline "Si IND.1-x" "C IND.x" :H thin films deposited by PECVD for SiC-on-insulator application. Journal of Non-Crystalline Solids, v. 338-340, 2004Tradução . . Disponível em: http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6TXM-4CCFCKJ-1-8&_cdi=5594&_user=972067&_orig=browse&_coverDate=06%2F15%2F2004&_sk=996619999&view=c&wchp=dGLbVlz-zSkWz&md5=768c7876eb02ac94f3aa329920376045&ie=/sdarticle.pdf. Acesso em: 04 set. 2024.APA
Escobar Forhan, N. A., Fantini, M. C. de A., & Pereyra, I. (2004). Nano-crystalline "Si IND.1-x" "C IND.x" :H thin films deposited by PECVD for SiC-on-insulator application. Journal of Non-Crystalline Solids, 338-340. Recuperado de http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6TXM-4CCFCKJ-1-8&_cdi=5594&_user=972067&_orig=browse&_coverDate=06%2F15%2F2004&_sk=996619999&view=c&wchp=dGLbVlz-zSkWz&md5=768c7876eb02ac94f3aa329920376045&ie=/sdarticle.pdfNLM
Escobar Forhan NA, Fantini MC de A, Pereyra I. Nano-crystalline "Si IND.1-x" "C IND.x" :H thin films deposited by PECVD for SiC-on-insulator application [Internet]. Journal of Non-Crystalline Solids. 2004 ; 338-340[citado 2024 set. 04 ] Available from: http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6TXM-4CCFCKJ-1-8&_cdi=5594&_user=972067&_orig=browse&_coverDate=06%2F15%2F2004&_sk=996619999&view=c&wchp=dGLbVlz-zSkWz&md5=768c7876eb02ac94f3aa329920376045&ie=/sdarticle.pdfVancouver
Escobar Forhan NA, Fantini MC de A, Pereyra I. Nano-crystalline "Si IND.1-x" "C IND.x" :H thin films deposited by PECVD for SiC-on-insulator application [Internet]. Journal of Non-Crystalline Solids. 2004 ; 338-340[citado 2024 set. 04 ] Available from: http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6TXM-4CCFCKJ-1-8&_cdi=5594&_user=972067&_orig=browse&_coverDate=06%2F15%2F2004&_sk=996619999&view=c&wchp=dGLbVlz-zSkWz&md5=768c7876eb02ac94f3aa329920376045&ie=/sdarticle.pdf