Study of power balance in electronegative capacitively coupled plasmas (2003)
- Authors:
- Autor USP: VERDONCK, PATRICK BERNARD - EP
- Unidade: EP
- Assunto: PLASMA (MICROELETRÔNICA)
- Language: Inglês
- Imprenta:
- Publisher: The Electrochemical Society
- Publisher place: Pennington
- Date published: 2003
- ISBN: 156677389X
- Source:
- Conference titles: International Symposium on Microelectronics Technology and Devices - SBMICRO
-
ABNT
SWART, Laura e VERDONCK, Patrick Bernard e MOSHKALYOV, Stanislav A. Study of power balance in electronegative capacitively coupled plasmas. 2003, Anais.. Pennington: The Electrochemical Society, 2003. . Acesso em: 27 fev. 2026. -
APA
Swart, L., Verdonck, P. B., & Moshkalyov, S. A. (2003). Study of power balance in electronegative capacitively coupled plasmas. In Microelectronic Technology and Devices SBMicro 2003. Pennington: The Electrochemical Society. -
NLM
Swart L, Verdonck PB, Moshkalyov SA. Study of power balance in electronegative capacitively coupled plasmas. Microelectronic Technology and Devices SBMicro 2003. 2003 ;[citado 2026 fev. 27 ] -
Vancouver
Swart L, Verdonck PB, Moshkalyov SA. Study of power balance in electronegative capacitively coupled plasmas. Microelectronic Technology and Devices SBMicro 2003. 2003 ;[citado 2026 fev. 27 ] - The influence of electrode material on argon plasmas
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