The influence of the AC component of the plasma potential on the measurement of the ion flux

The influence of the AC component of the plasma potential on the measurement of the ion flux (2004)

Authors:
- Swart, Jacobus Willibrordus
- Verdonck, Patrick Bernard
Autor USP: VERDONCK, PATRICK BERNARD - EP
Unidade: EP
Subjects: MICROELETRÔNICA; CIRCUITOS INTEGRADOS
Language: Inglês
Imprenta:
- Publisher: The Electrochemical Society
- Publisher place: Pennington
- Date published: 2004
ISBN: 1-56677-416-0
Source:
- Título do periódico: Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03
Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO

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ABNT

SWART, Jacobus Willibrordus; VERDONCK, Patrick Bernard. The influence of the AC component of the plasma potential on the measurement of the ion flux. Anais.. Pennington: The Electrochemical Society, 2004.
APA

Swart, J. W., & Verdonck, P. B. (2004). The influence of the AC component of the plasma potential on the measurement of the ion flux. In Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. Pennington: The Electrochemical Society.
NLM

Swart JW, Verdonck PB. The influence of the AC component of the plasma potential on the measurement of the ion flux. Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;
Vancouver

Swart JW, Verdonck PB. The influence of the AC component of the plasma potential on the measurement of the ion flux. Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;