Determination of the ion density and electron temperature using a planar electrostatic probe (2005)
- Authors:
- Autor USP: VERDONCK, PATRICK BERNARD - EP
- Unidade: EP
- Assunto: MICROELETRÔNICA
- Language: Inglês
- Imprenta:
- Publisher: The Electrochemical Society
- Publisher place: Pennington
- Date published: 2005
- ISBN: 1-56677-426-8
- Source:
- Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO
-
ABNT
SWART, Laura e VERDONCK, Patrick Bernard. Determination of the ion density and electron temperature using a planar electrostatic probe. 2005, Anais.. Pennington: The Electrochemical Society, 2005. . Acesso em: 19 fev. 2026. -
APA
Swart, L., & Verdonck, P. B. (2005). Determination of the ion density and electron temperature using a planar electrostatic probe. In Microelectronics Technology and Devices SBMICRO 2005. Pennington: The Electrochemical Society. -
NLM
Swart L, Verdonck PB. Determination of the ion density and electron temperature using a planar electrostatic probe. Microelectronics Technology and Devices SBMICRO 2005. 2005 ;[citado 2026 fev. 19 ] -
Vancouver
Swart L, Verdonck PB. Determination of the ion density and electron temperature using a planar electrostatic probe. Microelectronics Technology and Devices SBMICRO 2005. 2005 ;[citado 2026 fev. 19 ] - The influence of electrode material on argon plasmas
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