Determination of the ion density and electron temperature using a planar electrostatic probe (2005)
- Authors:
- Autor USP: VERDONCK, PATRICK BERNARD - EP
- Unidade: EP
- Assunto: MICROELETRÔNICA
- Language: Inglês
- Imprenta:
- Publisher: The Electrochemical Society
- Publisher place: Pennington
- Date published: 2005
- ISBN: 1-56677-426-8
- Source:
- Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO
-
ABNT
SWART, Laura e VERDONCK, Patrick Bernard. Determination of the ion density and electron temperature using a planar electrostatic probe. 2005, Anais.. Pennington: The Electrochemical Society, 2005. . Acesso em: 27 nov. 2025. -
APA
Swart, L., & Verdonck, P. B. (2005). Determination of the ion density and electron temperature using a planar electrostatic probe. In Microelectronics Technology and Devices SBMICRO 2005. Pennington: The Electrochemical Society. -
NLM
Swart L, Verdonck PB. Determination of the ion density and electron temperature using a planar electrostatic probe. Microelectronics Technology and Devices SBMICRO 2005. 2005 ;[citado 2025 nov. 27 ] -
Vancouver
Swart L, Verdonck PB. Determination of the ion density and electron temperature using a planar electrostatic probe. Microelectronics Technology and Devices SBMICRO 2005. 2005 ;[citado 2025 nov. 27 ] - Laser enhanced polymer etching in different ambients
- Desenvolvimento de um processo de corrosao de aluminio por plasma de cc14+n2
- Development and characterization of 'SI IND.3''N IND.4' plasma etching processes
- Estudo da impedancia do plasma num processo de corrosao
- The influence of electrode material on argon plasmas
- Study of power balance in electronegative capacitively coupled plasmas
- Aluminium etching with CC14-N2 plasma
- Characterization of SF6 plasmas by RF electrical measurements
- Projeto e construcao de um equipamento para corrosao de aluminio por plasma
- Contamination caused by reactive ion etching plasmas and subsequent cleaning procedures
How to cite
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
