Electrical characterization of thin gate oxynitride obtained by N+ implantation into polysilicon thermal oxide/silicon structure (2004)
- Authors:
- Autor USP: SANTOS FILHO, SEBASTIAO GOMES DOS - EP
- Unidade: EP
- Subjects: MICROELETRÔNICA; POLÍMEROS (MATERIAIS)
- Language: Inglês
- Imprenta:
- Publisher: The Electrochemical Society
- Publisher place: Pennington
- Date published: 2004
- ISBN: 1-56677-416-0
- Source:
- Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO
-
ABNT
TOQUETTI, Leandro Zeidan et al. Electrical characterization of thin gate oxynitride obtained by N+ implantation into polysilicon thermal oxide/silicon structure. 2004, Anais.. Pennington: The Electrochemical Society, 2004. . Acesso em: 13 mar. 2026. -
APA
Toquetti, L. Z., Santos Filho, S. G. dos, Diniz, J. A., & Swart, J. W. (2004). Electrical characterization of thin gate oxynitride obtained by N+ implantation into polysilicon thermal oxide/silicon structure. In Microelectronics technology and devices SBMicro 2004. Proceedings, v. 2004-03. Pennington: The Electrochemical Society. -
NLM
Toquetti LZ, Santos Filho SG dos, Diniz JA, Swart JW. Electrical characterization of thin gate oxynitride obtained by N+ implantation into polysilicon thermal oxide/silicon structure. Microelectronics technology and devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;[citado 2026 mar. 13 ] -
Vancouver
Toquetti LZ, Santos Filho SG dos, Diniz JA, Swart JW. Electrical characterization of thin gate oxynitride obtained by N+ implantation into polysilicon thermal oxide/silicon structure. Microelectronics technology and devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;[citado 2026 mar. 13 ] - Nano-crystalline palladium-film catalysts deposited by e-beam evaporation aiming hydrogen sensing
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