@inproceedings{inproceedingsbc1d2509,
title   = {Electrical characterization of thin gate oxynitride obtained by N+ implantation into polysilicon thermal oxide/silicon structure},
author = {Toquetti, Leandro Zeidan and Santos Filho, Sebastião Gomes dos and Diniz, José A. and Swart, Jacobus Willibrordus},
year = {2004},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}