Electrical and structural characterisation of DLC films deposited by magnetron sputtering (2001)
- Authors:
- USP affiliated authors: MANSANO, RONALDO DOMINGUES - EP ; VERDONCK, PATRICK BERNARD - EP ; MACIEL, HOMERO SANTIAGO - EP
- Unidade: EP
- DOI: 10.1023/A:1011252629646
- Assunto: FILMES
- Language: Inglês
- Imprenta:
- Source:
- Título do periódico: Journal of Materials Science: Materials in Electronics
- ISSN: 0957-4522
- Volume/Número/Paginação/Ano: v. 12, p. 343–346, 2001
- Conference titles: International Conference on Materials for Microelectronics
- Este periódico é de assinatura
- Este artigo NÃO é de acesso aberto
- Cor do Acesso Aberto: closed
-
ABNT
MASSI, Marcos et al. Electrical and structural characterisation of DLC films deposited by magnetron sputtering. Journal of Materials Science: Materials in Electronics, v. 12, p. 343–346, 2001Tradução . . Disponível em: https://doi.org/10.1023/A:1011252629646. Acesso em: 19 set. 2024. -
APA
Massi, M., Maciel, H. S., Otani, C., Mansano, R. D., & Verdonck, P. B. (2001). Electrical and structural characterisation of DLC films deposited by magnetron sputtering. Journal of Materials Science: Materials in Electronics, 12, 343–346. doi:10.1023/A:1011252629646 -
NLM
Massi M, Maciel HS, Otani C, Mansano RD, Verdonck PB. Electrical and structural characterisation of DLC films deposited by magnetron sputtering [Internet]. Journal of Materials Science: Materials in Electronics. 2001 ; 12 343–346.[citado 2024 set. 19 ] Available from: https://doi.org/10.1023/A:1011252629646 -
Vancouver
Massi M, Maciel HS, Otani C, Mansano RD, Verdonck PB. Electrical and structural characterisation of DLC films deposited by magnetron sputtering [Internet]. Journal of Materials Science: Materials in Electronics. 2001 ; 12 343–346.[citado 2024 set. 19 ] Available from: https://doi.org/10.1023/A:1011252629646 - Characterization of mode transitions for RF discharges in different gases
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Informações sobre o DOI: 10.1023/A:1011252629646 (Fonte: oaDOI API)
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