Performance characterization of an RIE reactor with built-in RF excitation antenna (2000)
- Authors:
- USP affiliated authors: VERDONCK, PATRICK BERNARD - EP ; MACIEL, HOMERO SANTIAGO - EP ; MANSANO, RONALDO DOMINGUES - EP
- Unidade: EP
- Assunto: ANTENAS
- Language: Inglês
- Imprenta:
- Source:
- Título: Solid-State Devices and Circuits
- ISSN: 0104-9631
- Volume/Número/Paginação/Ano: v. 8, n. 1, p. 1-4, Feb. 2000
-
ABNT
MASSI, Marcos et al. Performance characterization of an RIE reactor with built-in RF excitation antenna. Solid-State Devices and Circuits, v. 8, n. 1, p. 1-4, 2000Tradução . . Acesso em: 28 dez. 2025. -
APA
Massi, M., Mansano, R. D., Verdonck, P. B., Maciel, H. S., Cirino, G. A., Castro, R. M. de, & Pisani, M. B. (2000). Performance characterization of an RIE reactor with built-in RF excitation antenna. Solid-State Devices and Circuits, 8( 1), 1-4. -
NLM
Massi M, Mansano RD, Verdonck PB, Maciel HS, Cirino GA, Castro RM de, Pisani MB. Performance characterization of an RIE reactor with built-in RF excitation antenna. Solid-State Devices and Circuits. 2000 ; 8( 1): 1-4.[citado 2025 dez. 28 ] -
Vancouver
Massi M, Mansano RD, Verdonck PB, Maciel HS, Cirino GA, Castro RM de, Pisani MB. Performance characterization of an RIE reactor with built-in RF excitation antenna. Solid-State Devices and Circuits. 2000 ; 8( 1): 1-4.[citado 2025 dez. 28 ] - Characterization of mode transitions for RF discharges in different gases
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