Effects of the methane content on the characteristics of diamond-like carbon films produced by sputtering (2000)
- Authors:
- Autor USP: VERDONCK, PATRICK BERNARD - EP
- Unidade: EP
- DOI: 10.1016/s0040-6090(00)01088-9
- Assunto: FILMES
- Language: Inglês
- Imprenta:
- Source:
- Título: Thin Solid Films
- ISSN: 0040-6090
- Volume/Número/Paginação/Ano: n. 373, p. 243-246, 2000
- Este periódico é de acesso aberto
- Este artigo NÃO é de acesso aberto
-
ABNT
MANSANO, Ronaldo Domingues et al. Effects of the methane content on the characteristics of diamond-like carbon films produced by sputtering. Thin Solid Films, n. 373, p. 243-246, 2000Tradução . . Disponível em: https://doi.org/10.1016/s0040-6090(00)01088-9. Acesso em: 26 jan. 2026. -
APA
Mansano, R. D., Massi, M., Zambom, L. da S., Verdonck, P. B., Nogueira, P. M., Maciel, H. S., & Otani, C. (2000). Effects of the methane content on the characteristics of diamond-like carbon films produced by sputtering. Thin Solid Films, ( 373), 243-246. doi:10.1016/s0040-6090(00)01088-9 -
NLM
Mansano RD, Massi M, Zambom L da S, Verdonck PB, Nogueira PM, Maciel HS, Otani C. Effects of the methane content on the characteristics of diamond-like carbon films produced by sputtering [Internet]. Thin Solid Films. 2000 ;( 373): 243-246.[citado 2026 jan. 26 ] Available from: https://doi.org/10.1016/s0040-6090(00)01088-9 -
Vancouver
Mansano RD, Massi M, Zambom L da S, Verdonck PB, Nogueira PM, Maciel HS, Otani C. Effects of the methane content on the characteristics of diamond-like carbon films produced by sputtering [Internet]. Thin Solid Films. 2000 ;( 373): 243-246.[citado 2026 jan. 26 ] Available from: https://doi.org/10.1016/s0040-6090(00)01088-9 - The influence of diffusion of fluorine compounds for silicon lateral etching
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- A new mechanism for silicon etching with fluorine based plasmas
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Informações sobre o DOI: 10.1016/s0040-6090(00)01088-9 (Fonte: oaDOI API)
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