Microfluidic amplifiers fabricated in silicon using fluorine based plasma etching processes (1998)
Fonte: XIII SBMicro-ICMP'98 : proceedings. Nome do evento: International Conference on Microelectronics and Packaging. Unidade: EP
Assuntos: CIRCUITOS INTEGRADOS, SEMICONDUTORES
ABNT
SIMÕES, Eliphas Wagner et al. Microfluidic amplifiers fabricated in silicon using fluorine based plasma etching processes. 1998, Anais.. Curitiba: s. ed, 1998. . Acesso em: 15 nov. 2025.APA
Simões, E. W., Mansano, R. D., Furlan, R., & Verdonck, P. B. (1998). Microfluidic amplifiers fabricated in silicon using fluorine based plasma etching processes. In XIII SBMicro-ICMP'98 : proceedings. Curitiba: s. ed.NLM
Simões EW, Mansano RD, Furlan R, Verdonck PB. Microfluidic amplifiers fabricated in silicon using fluorine based plasma etching processes. XIII SBMicro-ICMP'98 : proceedings. 1998 ;[citado 2025 nov. 15 ]Vancouver
Simões EW, Mansano RD, Furlan R, Verdonck PB. Microfluidic amplifiers fabricated in silicon using fluorine based plasma etching processes. XIII SBMicro-ICMP'98 : proceedings. 1998 ;[citado 2025 nov. 15 ]
