Local anodic oxidation induced by electric fields of MV/cm at AFM silicon nitride tips on silicon surfaces (2008)
- Authors:
- Autor USP: SANTOS FILHO, SEBASTIAO GOMES DOS - EP
- Unidade: EP
- DOI: 10.1149/1.2956058
- Assunto: MICROELETRÔNICA
- Language: Inglês
- Imprenta:
- Publisher: The Electrochemical Society
- Publisher place: Pennington
- Date published: 2008
- Source:
- Título do periódico: SBMICRO 2008: Anais
- ISSN: 1938-5862
- Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO
- Este periódico é de assinatura
- Este artigo NÃO é de acesso aberto
- Cor do Acesso Aberto: closed
-
ABNT
PINTO, Diego Kops e SANTOS FILHO, Sebastião Gomes dos. Local anodic oxidation induced by electric fields of MV/cm at AFM silicon nitride tips on silicon surfaces. 2008, Anais.. Pennington: The Electrochemical Society, 2008. Disponível em: https://doi.org/10.1149/1.2956058. Acesso em: 19 set. 2024. -
APA
Pinto, D. K., & Santos Filho, S. G. dos. (2008). Local anodic oxidation induced by electric fields of MV/cm at AFM silicon nitride tips on silicon surfaces. In SBMICRO 2008: Anais. Pennington: The Electrochemical Society. doi:10.1149/1.2956058 -
NLM
Pinto DK, Santos Filho SG dos. Local anodic oxidation induced by electric fields of MV/cm at AFM silicon nitride tips on silicon surfaces [Internet]. SBMICRO 2008: Anais. 2008 ;[citado 2024 set. 19 ] Available from: https://doi.org/10.1149/1.2956058 -
Vancouver
Pinto DK, Santos Filho SG dos. Local anodic oxidation induced by electric fields of MV/cm at AFM silicon nitride tips on silicon surfaces [Internet]. SBMICRO 2008: Anais. 2008 ;[citado 2024 set. 19 ] Available from: https://doi.org/10.1149/1.2956058 - Formation of nickel silicides onto (100) silicon wafer surfaces using a thin platinum interlayer
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Informações sobre o DOI: 10.1149/1.2956058 (Fonte: oaDOI API)
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