Analysis of the surface roughness and surface particle concentration using a new technique: integrated angle resolved LASER scattering (IARLS) (2000)
- Authors:
- Autor USP: SANTOS FILHO, SEBASTIAO GOMES DOS - EP
- Unidade: EP
- Assunto: CIRCUITOS INTEGRADOS
- Language: Inglês
- Imprenta:
- Publisher: SBMicro/UA/UFRGS/UNICAMP/USP
- Publisher place: Manaus
- Date published: 2000
- Source:
- Título: SBMicro 2000: proceedings
- Conference titles: International Conference on Microelectronics and Packaging
-
ABNT
SOUZA FILHO, José Cândido de e SANTOS FILHO, Sebastião Gomes dos. Analysis of the surface roughness and surface particle concentration using a new technique: integrated angle resolved LASER scattering (IARLS). 2000, Anais.. Manaus: SBMicro/UA/UFRGS/UNICAMP/USP, 2000. . Acesso em: 11 out. 2024. -
APA
Souza Filho, J. C. de, & Santos Filho, S. G. dos. (2000). Analysis of the surface roughness and surface particle concentration using a new technique: integrated angle resolved LASER scattering (IARLS). In SBMicro 2000: proceedings. Manaus: SBMicro/UA/UFRGS/UNICAMP/USP. -
NLM
Souza Filho JC de, Santos Filho SG dos. Analysis of the surface roughness and surface particle concentration using a new technique: integrated angle resolved LASER scattering (IARLS). SBMicro 2000: proceedings. 2000 ;[citado 2024 out. 11 ] -
Vancouver
Souza Filho JC de, Santos Filho SG dos. Analysis of the surface roughness and surface particle concentration using a new technique: integrated angle resolved LASER scattering (IARLS). SBMicro 2000: proceedings. 2000 ;[citado 2024 out. 11 ] - Formation and stability of Ni(Pt)Si/Poly-Si layered structure
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