Source: SBMICRO. Conference titles: Symposium on Microelectronics Technology (SBMICRO). Unidade: EP
Subjects: MICROSCOPIA ELETRÔNICA DE VARREDURA, PLASMA (MICROELETRÔNICA), DISPOSITIVOS ÓPTICOS
ABNT
DELBONI, Filipe de Oliveira Pereira et al. Pedestal architecture to manufacture TeO2-ZnO waveguides for the development of photonic devices to operate in the infrared region. 2022, Anais.. Piscataway: IEEE, 2022. Disponível em: http://dx.doi.org/10.1109/SBMICRO55822.2022.9880965. Acesso em: 23 jan. 2026.APA
Delboni, F. de O. P., Kumada, D. K., Alayo Chávez, M. I., & Kassab, L. R. P. (2022). Pedestal architecture to manufacture TeO2-ZnO waveguides for the development of photonic devices to operate in the infrared region. In SBMICRO. Piscataway: IEEE. doi:10.1109/SBMICRO55822.2022.9880965NLM
Delboni F de OP, Kumada DK, Alayo Chávez MI, Kassab LRP. Pedestal architecture to manufacture TeO2-ZnO waveguides for the development of photonic devices to operate in the infrared region [Internet]. SBMICRO. 2022 ;[citado 2026 jan. 23 ] Available from: http://dx.doi.org/10.1109/SBMICRO55822.2022.9880965Vancouver
Delboni F de OP, Kumada DK, Alayo Chávez MI, Kassab LRP. Pedestal architecture to manufacture TeO2-ZnO waveguides for the development of photonic devices to operate in the infrared region [Internet]. SBMICRO. 2022 ;[citado 2026 jan. 23 ] Available from: http://dx.doi.org/10.1109/SBMICRO55822.2022.9880965
