Analysis of process parameters in "Smart cut" SOI structure fabrication (2001)
Source: SBMicro 2001: proceedings. Conference titles: International Conference on Microelectronics and Packaging. Unidade: EP
Assunto: CIRCUITOS INTEGRADOS
ABNT
ESCOBAR FORHAN, Neisy Amparo e BRAGA, Nelson Liebentritt de Almeida e GONÇALVES, José Lino. Analysis of process parameters in "Smart cut" SOI structure fabrication. 2001, Anais.. Brasília: SBMicro, 2001. . Acesso em: 06 nov. 2024.APA
Escobar Forhan, N. A., Braga, N. L. de A., & Gonçalves, J. L. (2001). Analysis of process parameters in "Smart cut" SOI structure fabrication. In SBMicro 2001: proceedings. Brasília: SBMicro.NLM
Escobar Forhan NA, Braga NL de A, Gonçalves JL. Analysis of process parameters in "Smart cut" SOI structure fabrication. SBMicro 2001: proceedings. 2001 ;[citado 2024 nov. 06 ]Vancouver
Escobar Forhan NA, Braga NL de A, Gonçalves JL. Analysis of process parameters in "Smart cut" SOI structure fabrication. SBMicro 2001: proceedings. 2001 ;[citado 2024 nov. 06 ]