Analysis of process parameters in "Smart cut" SOI structure fabrication (2001)
- Authors:
- Autor USP: BRAGA, NELSON LIEBENTRITT DE ALMEIDA - EP
- Unidade: EP
- Assunto: CIRCUITOS INTEGRADOS
- Language: Inglês
- Imprenta:
- Source:
- Título: SBMicro 2001: proceedings
- Conference titles: International Conference on Microelectronics and Packaging
-
ABNT
ESCOBAR FORHAN, Neisy Amparo e BRAGA, Nelson Liebentritt de Almeida e GONÇALVES, José Lino. Analysis of process parameters in "Smart cut" SOI structure fabrication. 2001, Anais.. Brasília: SBMicro, 2001. . Acesso em: 23 jan. 2026. -
APA
Escobar Forhan, N. A., Braga, N. L. de A., & Gonçalves, J. L. (2001). Analysis of process parameters in "Smart cut" SOI structure fabrication. In SBMicro 2001: proceedings. Brasília: SBMicro. -
NLM
Escobar Forhan NA, Braga NL de A, Gonçalves JL. Analysis of process parameters in "Smart cut" SOI structure fabrication. SBMicro 2001: proceedings. 2001 ;[citado 2026 jan. 23 ] -
Vancouver
Escobar Forhan NA, Braga NL de A, Gonçalves JL. Analysis of process parameters in "Smart cut" SOI structure fabrication. SBMicro 2001: proceedings. 2001 ;[citado 2026 jan. 23 ] - Near-exact two-dimensional mathematical model for pipe diffusion along dislocations
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- Analysis of process parameters in "Smart cut" SOI structure fabrication
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