Roughness and nanoholes in sol-gel thin films (2005)
Source: Microelectronics Journal. Unidade: IF
Subjects: MICROELETRÔNICA, FILMES FINOS
ABNT
ANTUNES, A et al. Roughness and nanoholes in sol-gel thin films. Microelectronics Journal, v. 36, n. 3-6, p. 567-569, 2005Tradução . . Disponível em: https://doi.org/10.1016/j.mejo.2005.02.078. Acesso em: 07 jul. 2024.APA
Antunes, A., Amaral, T., Brito, G. E. de S., Abramof, E., & Morelhao, S. L. (2005). Roughness and nanoholes in sol-gel thin films. Microelectronics Journal, 36( 3-6), 567-569. doi:10.1016/j.mejo.2005.02.078NLM
Antunes A, Amaral T, Brito GE de S, Abramof E, Morelhao SL. Roughness and nanoholes in sol-gel thin films [Internet]. Microelectronics Journal. 2005 ; 36( 3-6): 567-569.[citado 2024 jul. 07 ] Available from: https://doi.org/10.1016/j.mejo.2005.02.078Vancouver
Antunes A, Amaral T, Brito GE de S, Abramof E, Morelhao SL. Roughness and nanoholes in sol-gel thin films [Internet]. Microelectronics Journal. 2005 ; 36( 3-6): 567-569.[citado 2024 jul. 07 ] Available from: https://doi.org/10.1016/j.mejo.2005.02.078