Diamond like-carbon microoptics elements (2003)
- Authors:
- USP affiliated authors: VERDONCK, PATRICK BERNARD - EP ; MANSANO, RONALDO DOMINGUES - EP
- Unidade: EP
- Assunto: PLASMA (MICROELETRÔNICA)
- Language: Inglês
- Imprenta:
- Source:
- Título: EVC Abstracts
- Conference titles: European Vacuum Congress
-
ABNT
VERDONCK, Patrick Bernard et al. Diamond like-carbon microoptics elements. 2003, Anais.. Berlin: Elsevier, 2003. . Acesso em: 15 fev. 2026. -
APA
Verdonck, P. B., Mousinho, A. P., Mansano, R. D., & Genovesi, D. (2003). Diamond like-carbon microoptics elements. In EVC Abstracts. Berlin: Elsevier. -
NLM
Verdonck PB, Mousinho AP, Mansano RD, Genovesi D. Diamond like-carbon microoptics elements. EVC Abstracts. 2003 ;[citado 2026 fev. 15 ] -
Vancouver
Verdonck PB, Mousinho AP, Mansano RD, Genovesi D. Diamond like-carbon microoptics elements. EVC Abstracts. 2003 ;[citado 2026 fev. 15 ] - Complex-amplitude modulation diffractive optical element performed by aperture variations on a reflective aluminum layer deposited over a variable thickness SiO2 substrate
- High-density plasma chemical vapor deposition of amorphous carbon films
- The influence of additives on electrical characteristics of DLC films deposited by reactive sputtering
- Corrosão por plasma para aplicações em micromecânica
- Desenvolvimento de um processo de corrosao de aluminio por plasma de cc14+n2
- Contamination caused by reactive ion etching plasmas and subsequent cleaning procedures
- Deep trench etching in silicon with fluorine containing plasmas
- Silicon surface roughness induced by SF6-based reactive ion etching processes for micromachining applications
- Diamond microstructures fabricated using silicon molds
- End-point detection of polymer etching using Langmuir probes
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