Diamond like-carbon microoptics elements (2003)
- Authors:
- USP affiliated authors: VERDONCK, PATRICK BERNARD - EP ; MANSANO, RONALDO DOMINGUES - EP
- Unidade: EP
- Assunto: PLASMA (MICROELETRÔNICA)
- Language: Inglês
- Imprenta:
- Source:
- Título: EVC Abstracts
- Conference titles: European Vacuum Congress
-
ABNT
VERDONCK, Patrick Bernard et al. Diamond like-carbon microoptics elements. 2003, Anais.. Berlin: Elsevier, 2003. . Acesso em: 02 out. 2024. -
APA
Verdonck, P. B., Mousinho, A. P., Mansano, R. D., & Genovesi, D. (2003). Diamond like-carbon microoptics elements. In EVC Abstracts. Berlin: Elsevier. -
NLM
Verdonck PB, Mousinho AP, Mansano RD, Genovesi D. Diamond like-carbon microoptics elements. EVC Abstracts. 2003 ;[citado 2024 out. 02 ] -
Vancouver
Verdonck PB, Mousinho AP, Mansano RD, Genovesi D. Diamond like-carbon microoptics elements. EVC Abstracts. 2003 ;[citado 2024 out. 02 ] - High-density plasma chemical vapor deposition of amorphous carbon films
- Complex-amplitude modulation diffractive optical element performed by aperture variations on a reflective aluminium layer deposited over a variable thickness SiC2 substrate
- The influence of additives on electrical characteristics of DLC films deposited by reactive sputtering
- Corrosão por plasma para aplicações em micromecânica
- Characterization of mode transitions for RF discharges in different gases
- Silicon surface roughness induced by reactive ion etching processes, using a graphite electrode. (Em CD-Rom)
- Comparison between single and double Langmuir probe tecniques for analysis of inductively coupled plasmas
- Microfluidic amplifiers fabricated in silicon using fluorine based plasma etching processes
- Influence of methane addition on the characteristics of magnetron sputtered hydrogenated carbon films
- Effects of plasma etching on DLC films
How to cite
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas