The influence of electrode material on argon plasmas (2001)
Source: SBMicro 2001: proceedings. Conference titles: International Conference on Microelectronics and Packaging. Unidade: EP
Assunto: CIRCUITOS INTEGRADOS
ABNT
RUAS, Ronaldo et al. The influence of electrode material on argon plasmas. 2001, Anais.. Brasília: SBMicro, 2001. . Acesso em: 16 nov. 2025.APA
Ruas, R., Mansano, R. D., Verdonck, P. B., & Braithwaite, S. J. (2001). The influence of electrode material on argon plasmas. In SBMicro 2001: proceedings. Brasília: SBMicro.NLM
Ruas R, Mansano RD, Verdonck PB, Braithwaite SJ. The influence of electrode material on argon plasmas. SBMicro 2001: proceedings. 2001 ;[citado 2025 nov. 16 ]Vancouver
Ruas R, Mansano RD, Verdonck PB, Braithwaite SJ. The influence of electrode material on argon plasmas. SBMicro 2001: proceedings. 2001 ;[citado 2025 nov. 16 ]
