Theoretical and experimental studies of the atomic structure of oxygen-rich amorphous silicon oxynitride films (2003)
- Authors:
- USP affiliated authors: SILVA, ANTONIO JOSE ROQUE DA - IF ; FANTINI, MARCIA CARVALHO DE ABREU - IF ; FAZZIO, ADALBERTO - IF ; PEREYRA, INÊS - EP
- Unidades: IF; EP
- DOI: 10.1103/physrevb.68.155332
- Subjects: ESTRUTURA ATÔMICA (FÍSICA MODERNA); MÉTODO DE MONTE CARLO
- Language: Inglês
- Imprenta:
- Source:
- Título: Physical Review B
- ISSN: 1098-0121
- Volume/Número/Paginação/Ano: v. 68, n. 15, p. 155332/1-155332/6, 2003
- Este periódico é de acesso aberto
- Este artigo NÃO é de acesso aberto
-
ABNT
SCOPEL, Wanderla Luis et al. Theoretical and experimental studies of the atomic structure of oxygen-rich amorphous silicon oxynitride films. Physical Review B, v. 68, n. 15, p. 155332/1-155332/6, 2003Tradução . . Disponível em: https://doi.org/10.1103/physrevb.68.155332. Acesso em: 20 fev. 2026. -
APA
Scopel, W. L., Silva, A. J. R. da, Orellana, W. M., Prado, R. J., Fantini, M. C. de A., Fazzio, A., & Pereyra, I. (2003). Theoretical and experimental studies of the atomic structure of oxygen-rich amorphous silicon oxynitride films. Physical Review B, 68( 15), 155332/1-155332/6. doi:10.1103/physrevb.68.155332 -
NLM
Scopel WL, Silva AJR da, Orellana WM, Prado RJ, Fantini MC de A, Fazzio A, Pereyra I. Theoretical and experimental studies of the atomic structure of oxygen-rich amorphous silicon oxynitride films [Internet]. Physical Review B. 2003 ; 68( 15): 155332/1-155332/6.[citado 2026 fev. 20 ] Available from: https://doi.org/10.1103/physrevb.68.155332 -
Vancouver
Scopel WL, Silva AJR da, Orellana WM, Prado RJ, Fantini MC de A, Fazzio A, Pereyra I. Theoretical and experimental studies of the atomic structure of oxygen-rich amorphous silicon oxynitride films [Internet]. Physical Review B. 2003 ; 68( 15): 155332/1-155332/6.[citado 2026 fev. 20 ] Available from: https://doi.org/10.1103/physrevb.68.155332 - Experimental and theoretical local structure of oxygen-rich amorphous silicon oxynitride
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Informações sobre o DOI: 10.1103/physrevb.68.155332 (Fonte: oaDOI API)
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