Microelectronics Technology and Devices SBMICRO 2002 (2002)
- Authors:
- USP affiliated authors: MORIMOTO, NILTON ITIRO - EP ; VERDONCK, PATRICK BERNARD - EP
- Unidade: EP
- Assunto: MICROELETRÔNICA
- Language: Inglês
- Imprenta:
- Publisher: The Electrochemical Society
- Publisher place: Pennington
- Date published: 2002
- ISBN: 1-56677-328-8
- Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO
-
ABNT
Microelectronics Technology and Devices SBMICRO 2002. . Pennington: The Electrochemical Society. . Acesso em: 11 abr. 2026. , 2002 -
APA
Microelectronics Technology and Devices SBMICRO 2002. (2002). Microelectronics Technology and Devices SBMICRO 2002. Pennington: The Electrochemical Society. -
NLM
Microelectronics Technology and Devices SBMICRO 2002. 2002 ;[citado 2026 abr. 11 ] -
Vancouver
Microelectronics Technology and Devices SBMICRO 2002. 2002 ;[citado 2026 abr. 11 ] - Microelectronics Technology and Devices SBMICRO 2005
- Mechanical properties of silicon oxide films deposited by PECVD-TEOS for application in MEMS structures and sensors
- Mach-zehnder interferometer simulation results for integrated optical pressure sensor
- SIPOS thin films deposition process for power devices passivation
- Semiconductor light emitting diodes: an empirical study for use in fiber optic gyroscopes
- Caracterização de filmes finos de siliceto de titanio por técnicas de difração de Raio X
- Correlation between mechanical and electrical properties of silicon oxide deposited by PECVD-TEOS at low temperature
- Na Poli, nanosensores para carros e iogurtes
- Implementation of an optical integrated pressure sensor and experimental results
- Electrical characteristics of PECVD silicon oxide deposited with low TEOS contents at low temperatures
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