SIPOS thin films deposition process for power devices passivation (2000)
- Authors:
- Autor USP: MORIMOTO, NILTON ITIRO - EP
- Unidade: EP
- Assunto: CIRCUITOS INTEGRADOS
- Language: Inglês
- Imprenta:
- Publisher: SBMicro/UA/UFRGS/UNICAMP/USP
- Publisher place: Manaus
- Date published: 2000
- Source:
- Título: SBMicro 2000 : proceedings
- Conference titles: International Conference on Microelectronics and Packaging
-
ABNT
FERREIRA, Eduardo dos Santos e MORIMOTO, Nilton Itiro e MARZANO, Wanderley. SIPOS thin films deposition process for power devices passivation. 2000, Anais.. Manaus: SBMicro/UA/UFRGS/UNICAMP/USP, 2000. . Acesso em: 30 dez. 2025. -
APA
Ferreira, E. dos S., Morimoto, N. I., & Marzano, W. (2000). SIPOS thin films deposition process for power devices passivation. In SBMicro 2000 : proceedings. Manaus: SBMicro/UA/UFRGS/UNICAMP/USP. -
NLM
Ferreira E dos S, Morimoto NI, Marzano W. SIPOS thin films deposition process for power devices passivation. SBMicro 2000 : proceedings. 2000 ;[citado 2025 dez. 30 ] -
Vancouver
Ferreira E dos S, Morimoto NI, Marzano W. SIPOS thin films deposition process for power devices passivation. SBMicro 2000 : proceedings. 2000 ;[citado 2025 dez. 30 ] - Study of nickel silicide as mask for alkaline solutions to V-grooves fabrication
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