Novel Si field emission devices fabrication method based on HI-PS technique for gas sensors development (2008)
- Authors:
- USP affiliated authors: GALEAZZO, ELISABETE - EP ; PERES, HENRIQUE ESTANISLAU MALDONADO - EP ; FERNANDEZ, FRANCISCO JAVIER RAMIREZ - EP
- Unidade: EP
- Assunto: SENSORES QUÍMICOS
- Language: Inglês
- Imprenta:
- Source:
- Título: Proceedings
- Conference titles: International Meeting on Chemical Sensors
-
ABNT
DANTAS, Michel Oliveira da Silva et al. Novel Si field emission devices fabrication method based on HI-PS technique for gas sensors development. 2008, Anais.. Columbus: Escola Politécnica, Universidade de São Paulo, 2008. . Acesso em: 15 fev. 2026. -
APA
Dantas, M. O. da S., Galeazzo, E., Peres, H. E. M., Kopelvski, M. M., & Ramírez Fernandez, F. J. (2008). Novel Si field emission devices fabrication method based on HI-PS technique for gas sensors development. In Proceedings. Columbus: Escola Politécnica, Universidade de São Paulo. -
NLM
Dantas MO da S, Galeazzo E, Peres HEM, Kopelvski MM, Ramírez Fernandez FJ. Novel Si field emission devices fabrication method based on HI-PS technique for gas sensors development. Proceedings. 2008 ;[citado 2026 fev. 15 ] -
Vancouver
Dantas MO da S, Galeazzo E, Peres HEM, Kopelvski MM, Ramírez Fernandez FJ. Novel Si field emission devices fabrication method based on HI-PS technique for gas sensors development. Proceedings. 2008 ;[citado 2026 fev. 15 ] - Silicon microtips arrays fabricated by HI-PS technique for application in field emission devices
- Electrochemical process for silicon tips fabrication
- Responses of porous silicon to organic vapors
- Gas sensitive porous silicon devices: responses to organic vapors
- Silicon field-emission devices fabricated using the hydrogen implantation-porous silicon (HI-PS) micromachining technique
- Porous silicon processing for enhancing thin silicon membranes fabrication
- Porous silicon processing for enhancing thin silicon membranes fabrication
- Porous silicon for gas sensor applications
- Electrochemical process for MEMS fabrication
- Porous silicon sacrifical layers applied on micromechanical structures fabrication
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