Electrochemical process for silicon tips fabrication (2003)
- Authors:
- USP affiliated authors: GALEAZZO, ELISABETE - EP ; PERES, HENRIQUE ESTANISLAU MALDONADO - EP ; FERNANDEZ, FRANCISCO JAVIER RAMÍREZ - EP
- Unidade: EP
- Assunto: MICROELETRÔNICA
- Language: Inglês
- Imprenta:
- Publisher: Electrochemical Society
- Publisher place: Pennington
- Date published: 2003
- Source:
- Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO 2003, São Paulo /
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ABNT
DANTAS, Michel Oliveira da Silva et al. Electrochemical process for silicon tips fabrication. Microelectronic Technology and Devices SBMicro 2003. Tradução . Pennington: Electrochemical Society, 2003. . . Acesso em: 17 out. 2024. -
APA
Dantas, M. O. da S., Galeazzo, E., Peres, H. E. M., & Ramírez Fernandez, F. J. (2003). Electrochemical process for silicon tips fabrication. In Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society. -
NLM
Dantas MO da S, Galeazzo E, Peres HEM, Ramírez Fernandez FJ. Electrochemical process for silicon tips fabrication. In: Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society; 2003. [citado 2024 out. 17 ] -
Vancouver
Dantas MO da S, Galeazzo E, Peres HEM, Ramírez Fernandez FJ. Electrochemical process for silicon tips fabrication. In: Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society; 2003. [citado 2024 out. 17 ] - Dispositivos de teste da implantacao ionica de j2
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