Porous silicon for gas sensor applications (2004)
- Authors:
- USP affiliated authors: GALEAZZO, ELISABETE - EP ; PERES, HENRIQUE ESTANISLAU MALDONADO - EP ; FERNANDEZ, FRANCISCO JAVIER RAMIREZ - EP
- Unidade: EP
- Assunto: NANOTECNOLOGIA
- Language: Inglês
- Imprenta:
- Source:
- Título: NanoSemiMat-3.
- Conference titles: Workshop on Semiconductor Nanodevices and Nanostructured Materials
-
ABNT
GALEAZZO, Elisabete e PERES, Henrique Estanislau Maldonado e RAMÍREZ FERNANDEZ, Francisco Javier. Porous silicon for gas sensor applications. 2004, Anais.. Brasília: MCT, 2004. . Acesso em: 12 fev. 2026. -
APA
Galeazzo, E., Peres, H. E. M., & Ramírez Fernandez, F. J. (2004). Porous silicon for gas sensor applications. In NanoSemiMat-3.. Brasília: MCT. -
NLM
Galeazzo E, Peres HEM, Ramírez Fernandez FJ. Porous silicon for gas sensor applications. NanoSemiMat-3. 2004 ;[citado 2026 fev. 12 ] -
Vancouver
Galeazzo E, Peres HEM, Ramírez Fernandez FJ. Porous silicon for gas sensor applications. NanoSemiMat-3. 2004 ;[citado 2026 fev. 12 ] - Silicon microtips arrays fabricated by HI-PS technique for application in field emission devices
- Electrochemical process for silicon tips fabrication
- Responses of porous silicon to organic vapors
- Gas sensitive porous silicon devices: responses to organic vapors
- Silicon field-emission devices fabricated using the hydrogen implantation-porous silicon (HI-PS) micromachining technique
- Porous silicon processing for enhancing thin silicon membranes fabrication
- Porous silicon processing for enhancing thin silicon membranes fabrication
- Novel Si field emission devices fabrication method based on HI-PS technique for gas sensors development
- Electrochemical process for MEMS fabrication
- Porous silicon sacrifical layers applied on micromechanical structures fabrication
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