Porous silicon processing for enhancing thin silicon membranes fabrication (2003)
- Authors:
- USP affiliated authors: GALEAZZO, ELISABETE - EP ; PERES, HENRIQUE ESTANISLAU MALDONADO - EP ; FERNANDEZ, FRANCISCO JAVIER RAMÍREZ - EP
- Unidade: EP
- Assunto: MICROELETRÔNICA
- Language: Inglês
- Imprenta:
- Publisher: Electrochemical Society
- Publisher place: Pennington
- Date published: 2003
- Source:
- Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO 2003, São Paulo /
-
ABNT
DANTAS, Michel Oliveira da Silva et al. Porous silicon processing for enhancing thin silicon membranes fabrication. Microelectronic Technology and Devices SBMicro 2003: proceedings. Tradução . Pennington: Electrochemical Society, 2003. . . Acesso em: 29 dez. 2025. -
APA
Dantas, M. O. da S., Galeazzo, E., Peres, H. E. M., & Ramírez Fernandez, F. J. (2003). Porous silicon processing for enhancing thin silicon membranes fabrication. In Microelectronic Technology and Devices SBMicro 2003: proceedings. Pennington: Electrochemical Society. -
NLM
Dantas MO da S, Galeazzo E, Peres HEM, Ramírez Fernandez FJ. Porous silicon processing for enhancing thin silicon membranes fabrication. In: Microelectronic Technology and Devices SBMicro 2003: proceedings. Pennington: Electrochemical Society; 2003. [citado 2025 dez. 29 ] -
Vancouver
Dantas MO da S, Galeazzo E, Peres HEM, Ramírez Fernandez FJ. Porous silicon processing for enhancing thin silicon membranes fabrication. In: Microelectronic Technology and Devices SBMicro 2003: proceedings. Pennington: Electrochemical Society; 2003. [citado 2025 dez. 29 ] - Dispositivos de teste da implantacao ionica de j2
- Gas sensitive porous silicon devices: responses to organic vapors
- Silicon micromechanical structures fabricated by electrochemical process
- Porous silicon sacrifical layers applied on micromechanical structures fabrication
- Novel Si field emission devices fabrication method based on HI-PS technique for gas sensors development
- Electrochemical process for silicon tips fabrication
- Responses of porous silicon to organic vapors
- Electrochemical process for MEMS fabrication
- Porous silicon for gas sensor applications
- Silicon field-emission devices fabricated using the hydrogen implantation-porous silicon (HI-PS) micromachining technique
How to cite
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
