Porous silicon processing for enhancing thin silicon membranes fabrication (2003)
- Authors:
- USP affiliated authors: GALEAZZO, ELISABETE - EP ; PERES, HENRIQUE ESTANISLAU MALDONADO - EP ; FERNANDEZ, FRANCISCO JAVIER RAMÍREZ - EP
- Unidade: EP
- Subjects: MICROELETRÔNICA; SILÍCIO
- Language: Inglês
- Imprenta:
- Source:
- ISSN: 1517-3542
-
ABNT
DANTAS, Michel Oliveira da Silva et al. Porous silicon processing for enhancing thin silicon membranes fabrication. . São Paulo: EPUSP. . Acesso em: 29 dez. 2025. , 2003 -
APA
Dantas, M. O. da S., Galeazzo, E., Peres, H. E. M., & Ramírez Fernandez, F. J. (2003). Porous silicon processing for enhancing thin silicon membranes fabrication. São Paulo: EPUSP. -
NLM
Dantas MO da S, Galeazzo E, Peres HEM, Ramírez Fernandez FJ. Porous silicon processing for enhancing thin silicon membranes fabrication. 2003 ;[citado 2025 dez. 29 ] -
Vancouver
Dantas MO da S, Galeazzo E, Peres HEM, Ramírez Fernandez FJ. Porous silicon processing for enhancing thin silicon membranes fabrication. 2003 ;[citado 2025 dez. 29 ] - Dispositivos de teste da implantacao ionica de j2
- Gas sensitive porous silicon devices: responses to organic vapors
- Silicon micromechanical structures fabricated by electrochemical process
- Porous silicon sacrifical layers applied on micromechanical structures fabrication
- Novel Si field emission devices fabrication method based on HI-PS technique for gas sensors development
- Electrochemical process for silicon tips fabrication
- Responses of porous silicon to organic vapors
- Electrochemical process for MEMS fabrication
- Porous silicon for gas sensor applications
- Silicon field-emission devices fabricated using the hydrogen implantation-porous silicon (HI-PS) micromachining technique
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