Integrated optical chemical sensor fabricated on silicon substrate (2005)
- Authors:
- USP affiliated authors: MORIMOTO, NILTON ITIRO - EP ; BAPTISTA, MAURICIO DA SILVA - IQ ; BORGES, BEN HUR VIANA - EESC
- Unidades: EP; IQ; EESC
- Assunto: MICROELETRÔNICA
- Language: Inglês
- Imprenta:
- Publisher: The Electrochemical Society
- Publisher place: Pennington
- Date published: 2005
- ISBN: 1-56677-426-8
- Source:
- Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO
-
ABNT
SIARKOWSKI, Acácio Luiz et al. Integrated optical chemical sensor fabricated on silicon substrate. 2005, Anais.. Pennington: The Electrochemical Society, 2005. . Acesso em: 02 dez. 2025. -
APA
Siarkowski, A. L., Morimoto, N. I., Baptista, M. da S., & Borges, B. -H. V. (2005). Integrated optical chemical sensor fabricated on silicon substrate. In Microelectronics Technology and Devices SBMICRO 2005. Pennington: The Electrochemical Society. -
NLM
Siarkowski AL, Morimoto NI, Baptista M da S, Borges B-HV. Integrated optical chemical sensor fabricated on silicon substrate. Microelectronics Technology and Devices SBMICRO 2005. 2005 ;[citado 2025 dez. 02 ] -
Vancouver
Siarkowski AL, Morimoto NI, Baptista M da S, Borges B-HV. Integrated optical chemical sensor fabricated on silicon substrate. Microelectronics Technology and Devices SBMICRO 2005. 2005 ;[citado 2025 dez. 02 ] - Fabrication of Ti-Si-Ti metal-semiconductor-metal photodetectors using low temperature rapid thermal annealing
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