Formation of 3C-SIC films on silicon by thermal annealing process

Formation of 3C-SIC films on silicon by thermal annealing process (2004)

A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas

ABNT

OLIVEIRA, Alessandro Ricardo de; PAEZ CARREÑO, Marcelo Nelson. Formation of 3C-SIC films on silicon by thermal annealing process. Anais.. Pennington: The Electrochemical Society, 2004.
APA

Oliveira, A. R. de, & Paez Carreño, M. N. (2004). Formation of 3C-SIC films on silicon by thermal annealing process. In Microelectronics technology and devices SBMicro 2004. Proceedings, v. 2004-03. Pennington: The Electrochemical Society.
NLM

Oliveira AR de, Paez Carreño MN. Formation of 3C-SIC films on silicon by thermal annealing process. Microelectronics technology and devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;
Vancouver

Oliveira AR de, Paez Carreño MN. Formation of 3C-SIC films on silicon by thermal annealing process. Microelectronics technology and devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;