Fabrication of silicon probes for biosensors (2000)
- Authors:
- USP affiliated authors: FURLAN, ROGERIO - EP ; MANSANO, RONALDO DOMINGUES - EP
- Unidade: EP
- Assunto: CIRCUITOS INTEGRADOS
- Language: Inglês
- Imprenta:
- Publisher: SBMicro/UA/UFRGS/UNICAMP/USP
- Publisher place: Manaus
- Date published: 2000
- Source:
- Título: SBMicro 2000 : proceedings
- Conference titles: International Conference on Microelectronics and Packaging
-
ABNT
FONTES, Marcelo Bariatto Andrade et al. Fabrication of silicon probes for biosensors. 2000, Anais.. Manaus: SBMicro/UA/UFRGS/UNICAMP/USP, 2000. . Acesso em: 13 nov. 2025. -
APA
Fontes, M. B. A., Furlan, R., Santiago-Avilés, J. J., & Mansano, R. D. (2000). Fabrication of silicon probes for biosensors. In SBMicro 2000 : proceedings. Manaus: SBMicro/UA/UFRGS/UNICAMP/USP. -
NLM
Fontes MBA, Furlan R, Santiago-Avilés JJ, Mansano RD. Fabrication of silicon probes for biosensors. SBMicro 2000 : proceedings. 2000 ;[citado 2025 nov. 13 ] -
Vancouver
Fontes MBA, Furlan R, Santiago-Avilés JJ, Mansano RD. Fabrication of silicon probes for biosensors. SBMicro 2000 : proceedings. 2000 ;[citado 2025 nov. 13 ] - Deposition of silicon nitride films by LPCVD assisted by high density plasma
- Silicon nitride coupled plasma deposited from mixtures of silane-nitrogen and silane-ammonia
- Characteristics of silicon nitride films deposited by inductively coulped plasma CVD
- Microfluidic amplifiers fabricated in silicon using fluorine based plasma etching processes
- Application of fluorine based plasma etching processes in microfluidic device fabrication
- LPCVD deposition of silicon nitride assisted by high density plasmas
- Obtenção de filmes de nitreto de silício por deposição química assistida por plasma acoplado indutivamente
- Microfluidics
- Development of a flow microsensor built on silicon
- Dopant redistribution during the formation of cobal silicide using two thermal stages
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