Plasma parameters obtained with planar probe and optical emission spectroscopy (2007)
Source: Journal of Integrated Circuits and Systems. Unidade: EP
Subjects: MICROELETRÔNICA, CIÊNCIA DA COMPUTAÇÃO
ABNT
DALTRINI, Andre M et al. Plasma parameters obtained with planar probe and optical emission spectroscopy. Journal of Integrated Circuits and Systems, v. 2, n. 2, 2007Tradução . . Acesso em: 12 out. 2024.APA
Daltrini, A. M., Moshkalev, S., Swart, L., & Verdonck, P. B. (2007). Plasma parameters obtained with planar probe and optical emission spectroscopy. Journal of Integrated Circuits and Systems, 2( 2).NLM
Daltrini AM, Moshkalev S, Swart L, Verdonck PB. Plasma parameters obtained with planar probe and optical emission spectroscopy. Journal of Integrated Circuits and Systems. 2007 ; 2( 2):[citado 2024 out. 12 ]Vancouver
Daltrini AM, Moshkalev S, Swart L, Verdonck PB. Plasma parameters obtained with planar probe and optical emission spectroscopy. Journal of Integrated Circuits and Systems. 2007 ; 2( 2):[citado 2024 out. 12 ]