Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates (2003)
- Authors:
- USP affiliated authors: GONCALVES NETO, LUIZ - EESC ; MANSANO, RONALDO DOMINGUES - EP ; VERDONCK, PATRICK BERNARD - EP
- Unidades: EESC; EP
- Subjects: ÓPTICA ELETRÔNICA; MICROELETRÔNICA
- Language: Inglês
- Imprenta:
- Publisher place: Bellingham
- Date published: 2003
- ISBN: 0277786X
- Source:
- Título: Proceedings of SPIE
- Volume/Número/Paginação/Ano: v. 4984, p. 18-28, 2003
- Conference titles: Micromachining Technology for Micro-Optics and Nano-Optics
-
ABNT
GONÇALVES NETO, Luiz et al. Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates. Proceedings of SPIE. Bellingham: Escola de Engenharia de São Carlos, Universidade de São Paulo. Disponível em: https://repositorio.usp.br/directbitstream/2788d87c-05ac-46fb-85ec-ead979caa42d/ok1369126.pdf. Acesso em: 28 dez. 2025. , 2003 -
APA
Gonçalves Neto, L., Cirino, G. A., Mansano, R. D., Cardona, P. S. P., & Verdonck, P. B. (2003). Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates. Proceedings of SPIE. Bellingham: Escola de Engenharia de São Carlos, Universidade de São Paulo. Recuperado de https://repositorio.usp.br/directbitstream/2788d87c-05ac-46fb-85ec-ead979caa42d/ok1369126.pdf -
NLM
Gonçalves Neto L, Cirino GA, Mansano RD, Cardona PSP, Verdonck PB. Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates [Internet]. Proceedings of SPIE. 2003 ; 4984 18-28.[citado 2025 dez. 28 ] Available from: https://repositorio.usp.br/directbitstream/2788d87c-05ac-46fb-85ec-ead979caa42d/ok1369126.pdf -
Vancouver
Gonçalves Neto L, Cirino GA, Mansano RD, Cardona PSP, Verdonck PB. Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates [Internet]. Proceedings of SPIE. 2003 ; 4984 18-28.[citado 2025 dez. 28 ] Available from: https://repositorio.usp.br/directbitstream/2788d87c-05ac-46fb-85ec-ead979caa42d/ok1369126.pdf - Design, fabrication, and characterization of a full complex-amplitude modulation diffractive optical element
- Implementation of Fresnel full complex-amplitude digital holograms
- Full complex amplitude digital holograms: design, fabrication and optical characterization
- Fabrication of PMMA microlenses using a micromachined silicon moud
- Design of continuous full complex modulation proximity printing masks using a quadratic phase distribution
- Full complex amplitude modulation proximity printing mask fabricated on DLC and SiO2 subtrates
- Digital holography: computer-generated holograms and diffractive optics in scalar diffraction domain
- Fabrication of a continuous parabolic surface relief array using a silicon-based wet-etch micromachining
- Diamond like-carbon microoptics elements
- Design and fabrication of a hybrid diffractive optical device for multiple-line generation over a wide angle
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