Fabrication of a continuous parabolic surface relief array using a silicon-based wet-etch micromachining (2000)
- Authors:
- USP affiliated authors: GONCALVES NETO, LUIZ - EESC ; VERDONCK, PATRICK BERNARD - EP ; CIRINO, GIUSEPPE ANTONIO - EP ; MANSANO, RONALDO DOMINGUES - EP
- Unidades: EESC; EP
- DOI: 10.1364/OFT.2000.OMB3
- Subjects: ENGENHARIA ELÉTRICA; USINAGEM; SILICONE; ÓPTICA; PROCESSOS DE FABRICAÇÃO
- Language: Inglês
- Imprenta:
- Publisher: OSA Publishing
- Publisher place: Washington, DC, USA
- Date published: 2000
- Conference titles: Optical Fabrication and Testing 2000
- Este periódico é de assinatura
- Este artigo NÃO é de acesso aberto
- Cor do Acesso Aberto: closed
-
ABNT
CIRINO, Giuseppe Antonio et al. Fabrication of a continuous parabolic surface relief array using a silicon-based wet-etch micromachining. 2000, Anais.. Washington, DC, USA: OSA Publishing, 2000. Disponível em: https://doi.org/10.1364/OFT.2000.OMB3. Acesso em: 29 dez. 2025. -
APA
Cirino, G. A., Mansano, R. D., Verdonck, P. B., Lichti, P. A., Stefani, M. A., & Gonçalves Neto, L. (2000). Fabrication of a continuous parabolic surface relief array using a silicon-based wet-etch micromachining. In . Washington, DC, USA: OSA Publishing. doi:10.1364/OFT.2000.OMB3 -
NLM
Cirino GA, Mansano RD, Verdonck PB, Lichti PA, Stefani MA, Gonçalves Neto L. Fabrication of a continuous parabolic surface relief array using a silicon-based wet-etch micromachining [Internet]. 2000 ;[citado 2025 dez. 29 ] Available from: https://doi.org/10.1364/OFT.2000.OMB3 -
Vancouver
Cirino GA, Mansano RD, Verdonck PB, Lichti PA, Stefani MA, Gonçalves Neto L. Fabrication of a continuous parabolic surface relief array using a silicon-based wet-etch micromachining [Internet]. 2000 ;[citado 2025 dez. 29 ] Available from: https://doi.org/10.1364/OFT.2000.OMB3 - Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates
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Informações sobre o DOI: 10.1364/OFT.2000.OMB3 (Fonte: oaDOI API)
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