Implementation of an optical integrated pressure sensor and experimental results (2002)
- Authors:
- Autor USP: MORIMOTO, NILTON ITIRO - EP
- Unidade: EP
- Assunto: MICROELETRÔNICA
- Language: Inglês
- Imprenta:
- Publisher: The Electrochemical Society
- Publisher place: Pennington
- Date published: 2002
- Source:
- Título do periódico: Microelectronics Technology and Devices SBMICRO 2002
- Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO
-
ABNT
SIARKOWSKI, Acácio Luiz e BULLA, Douglas Anderson Pereira e MORIMOTO, Nilton Itiro. Implementation of an optical integrated pressure sensor and experimental results. Microelectronics Technology and Devices SBMICRO 2002. Tradução . Pennington: The Electrochemical Society, 2002. . . Acesso em: 26 abr. 2024. -
APA
Siarkowski, A. L., Bulla, D. A. P., & Morimoto, N. I. (2002). Implementation of an optical integrated pressure sensor and experimental results. In Microelectronics Technology and Devices SBMICRO 2002. Pennington: The Electrochemical Society. -
NLM
Siarkowski AL, Bulla DAP, Morimoto NI. Implementation of an optical integrated pressure sensor and experimental results. In: Microelectronics Technology and Devices SBMICRO 2002. Pennington: The Electrochemical Society; 2002. [citado 2024 abr. 26 ] -
Vancouver
Siarkowski AL, Bulla DAP, Morimoto NI. Implementation of an optical integrated pressure sensor and experimental results. In: Microelectronics Technology and Devices SBMICRO 2002. Pennington: The Electrochemical Society; 2002. [citado 2024 abr. 26 ] - Method to obtain TEOS PECVD silicon oxide thick layers for optoelectronics devices applications. (em CD-Rom)
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