Source: SBMICRO 2008: Anais. Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO. Unidade: EP
Assunto: MICROELETRÔNICA
ABNT
REHDER, Gustavo Pamplona e PAEZ CARREÑO, Marcelo Nelson. Piezoelectric stimulation of microcantilever beams for young's modulus determination of amorphous hydrogenated silicon carbide. 2008, Anais.. Pennington: The Electrochemical Society, 2008. . Acesso em: 15 nov. 2025.APA
Rehder, G. P., & Paez Carreño, M. N. (2008). Piezoelectric stimulation of microcantilever beams for young's modulus determination of amorphous hydrogenated silicon carbide. In SBMICRO 2008: Anais. Pennington: The Electrochemical Society.NLM
Rehder GP, Paez Carreño MN. Piezoelectric stimulation of microcantilever beams for young's modulus determination of amorphous hydrogenated silicon carbide. SBMICRO 2008: Anais. 2008 ;[citado 2025 nov. 15 ]Vancouver
Rehder GP, Paez Carreño MN. Piezoelectric stimulation of microcantilever beams for young's modulus determination of amorphous hydrogenated silicon carbide. SBMICRO 2008: Anais. 2008 ;[citado 2025 nov. 15 ]

