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Trabalho de evento
Dry etching of resist for three level resist process using statistical design of experiments (1995)
Mansano, Ronaldo Domingues ; Verdonck, Patrick Bernard; Maciel, H. S.
Source: Proceedings. Conference titles: Congress of the Brazilian Microelectronics Society. Unidade: EP
Assunto: CIRCUITOS INTEGRADOS
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
ABNT
MANSANO, Ronaldo Domingues e VERDONCK, Patrick Bernard e MACIEL, H. S. Dry etching of resist for three level resist process using statistical design of experiments. 1995, Anais.. Porto Alegre: Instituto de Informatica da Ufrgs, 1995. . Acesso em: 16 jul. 2024.
APA
Mansano, R. D., Verdonck, P. B., & Maciel, H. S. (1995). Dry etching of resist for three level resist process using statistical design of experiments. In Proceedings. Porto Alegre: Instituto de Informatica da Ufrgs.
NLM
Mansano RD, Verdonck PB, Maciel HS. Dry etching of resist for three level resist process using statistical design of experiments. Proceedings. 1995 ;[citado 2024 jul. 16 ]
Vancouver
Mansano RD, Verdonck PB, Maciel HS. Dry etching of resist for three level resist process using statistical design of experiments. Proceedings. 1995 ;[citado 2024 jul. 16 ]
Trabalho de evento
Energy analysis of electrons, positive and negative ions in oxygen plasma beams (1993)
Petraconi, G; Maciel, H. S.
Source: Proceedings. Conference titles: Encontro Brasileiro de Fisica. Unidade: EP
Assunto: CIRCUITOS INTEGRADOS
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
ABNT
PETRACONI, G e MACIEL, H. S. Energy analysis of electrons, positive and negative ions in oxygen plasma beams. 1993, Anais.. Sao Jose dos Campos: SBF/Inpe, 1993. . Acesso em: 16 jul. 2024.
APA
Petraconi, G., & Maciel, H. S. (1993). Energy analysis of electrons, positive and negative ions in oxygen plasma beams. In Proceedings. Sao Jose dos Campos: SBF/Inpe.
NLM
Petraconi G, Maciel HS. Energy analysis of electrons, positive and negative ions in oxygen plasma beams. Proceedings. 1993 ;[citado 2024 jul. 16 ]
Vancouver
Petraconi G, Maciel HS. Energy analysis of electrons, positive and negative ions in oxygen plasma beams. Proceedings. 1993 ;[citado 2024 jul. 16 ]
Trabalho de evento
Plasma enhanced chemical vapor infiltration for carbon / carbon composite manufacture (1993)
Nogueira, C L; Otani, C; Maciel, H. S.; Petraconi, G; Aquino, E
Source: Proceedings. Conference titles: Encontro Brasileiro de Fisica dos Plasmas. Unidade: EP
Assunto: CIRCUITOS INTEGRADOS
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
ABNT
NOGUEIRA, C L et al. Plasma enhanced chemical vapor infiltration for carbon / carbon composite manufacture. 1993, Anais.. Sao Jose dos Campos: SBF/Inpe, 1993. . Acesso em: 16 jul. 2024.
APA
Nogueira, C. L., Otani, C., Maciel, H. S., Petraconi, G., & Aquino, E. (1993). Plasma enhanced chemical vapor infiltration for carbon / carbon composite manufacture. In Proceedings. Sao Jose dos Campos: SBF/Inpe.
NLM
Nogueira CL, Otani C, Maciel HS, Petraconi G, Aquino E. Plasma enhanced chemical vapor infiltration for carbon / carbon composite manufacture. Proceedings. 1993 ;[citado 2024 jul. 16 ]
Vancouver
Nogueira CL, Otani C, Maciel HS, Petraconi G, Aquino E. Plasma enhanced chemical vapor infiltration for carbon / carbon composite manufacture. Proceedings. 1993 ;[citado 2024 jul. 16 ]

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