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Silicon wall profiles generated by isotropic dry etching process (1997)
Mansano, Ronaldo Domingues ; Verdonck, Patrick Bernard; Maciel, Homero Santiago
Source: CIP'97 : proceedings. Conference titles: International Colloquium on Plasma Processes. Unidade: EP
Assunto: CIRCUITOS INTEGRADOS
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
ABNT
MANSANO, Ronaldo Domingues e VERDONCK, Patrick Bernard e MACIEL, Homero Santiago. Silicon wall profiles generated by isotropic dry etching process. 1997, Anais.. Paris: Société Française du Vide, 1997. . Acesso em: 05 nov. 2024.
APA
Mansano, R. D., Verdonck, P. B., & Maciel, H. S. (1997). Silicon wall profiles generated by isotropic dry etching process. In CIP'97 : proceedings. Paris: Société Française du Vide.
NLM
Mansano RD, Verdonck PB, Maciel HS. Silicon wall profiles generated by isotropic dry etching process. CIP'97 : proceedings. 1997 ;[citado 2024 nov. 05 ]
Vancouver
Mansano RD, Verdonck PB, Maciel HS. Silicon wall profiles generated by isotropic dry etching process. CIP'97 : proceedings. 1997 ;[citado 2024 nov. 05 ]
Artigo de periodico
Diamond membranes with controlled porosity (1997)
Mammana, Victor Pellegrini; Mansano, Ronaldo Domingues ; Verdonck, Patrick Bernard; Pavani Filho, A; Salvadori, Maria Cecília Barbosa da Silveira
Source: Diamond and Related Materials. Unidades: IF, EP
Assunto: FÍSICO-QUÍMICA
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
ABNT
MAMMANA, Victor Pellegrini et al. Diamond membranes with controlled porosity. Diamond and Related Materials, v. 6, n. 12, p. 1824-1829, 1997Tradução . . Disponível em: https://doi.org/10.1016/s0925-9635(97)00145-3. Acesso em: 05 nov. 2024.
APA
Mammana, V. P., Mansano, R. D., Verdonck, P. B., Pavani Filho, A., & Salvadori, M. C. B. da S. (1997). Diamond membranes with controlled porosity. Diamond and Related Materials, 6( 12), 1824-1829. doi:10.1016/s0925-9635(97)00145-3
NLM
Mammana VP, Mansano RD, Verdonck PB, Pavani Filho A, Salvadori MCB da S. Diamond membranes with controlled porosity [Internet]. Diamond and Related Materials. 1997 ; 6( 12): 1824-1829.[citado 2024 nov. 05 ] Available from: https://doi.org/10.1016/s0925-9635(97)00145-3
Vancouver
Mammana VP, Mansano RD, Verdonck PB, Pavani Filho A, Salvadori MCB da S. Diamond membranes with controlled porosity [Internet]. Diamond and Related Materials. 1997 ; 6( 12): 1824-1829.[citado 2024 nov. 05 ] Available from: https://doi.org/10.1016/s0925-9635(97)00145-3
Artigo de periodico
Mechanisms of surface roughness induced in silicon by fluorine containing plasmas (1997)
Mansano, Ronaldo Domingues ; Verdonck, Patrick Bernard; Maciel, Homero Santiago
Source: Vaccum. Unidade: EP
Assunto: CIRCUITOS INTEGRADOS
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
ABNT
MANSANO, Ronaldo Domingues e VERDONCK, Patrick Bernard e MACIEL, Homero Santiago. Mechanisms of surface roughness induced in silicon by fluorine containing plasmas. Vaccum, v. 48, n. 7-9, p. 677-679, 1997Tradução . . Disponível em: https://doi.org/10.1016/s0042-207x(97)00067-5. Acesso em: 05 nov. 2024.
APA
Mansano, R. D., Verdonck, P. B., & Maciel, H. S. (1997). Mechanisms of surface roughness induced in silicon by fluorine containing plasmas. Vaccum, 48( 7-9), 677-679. doi:10.1016/s0042-207x(97)00067-5
NLM
Mansano RD, Verdonck PB, Maciel HS. Mechanisms of surface roughness induced in silicon by fluorine containing plasmas [Internet]. Vaccum. 1997 ; 48( 7-9): 677-679.[citado 2024 nov. 05 ] Available from: https://doi.org/10.1016/s0042-207x(97)00067-5
Vancouver
Mansano RD, Verdonck PB, Maciel HS. Mechanisms of surface roughness induced in silicon by fluorine containing plasmas [Internet]. Vaccum. 1997 ; 48( 7-9): 677-679.[citado 2024 nov. 05 ] Available from: https://doi.org/10.1016/s0042-207x(97)00067-5

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