Source: Proceedings of SPIE. Conference titles: Micromachining Technology for Micro-Optics and Nano-Optics II. Unidades: EESC, EP
Subjects: ÓPTICA ELETRÔNICA, MICROELETRÔNICA
ABNT
GONÇALVES NETO, Luiz et al. Design of continuous full complex modulation proximity printing masks using a quadratic phase distribution. Proceedings of SPIE. Bellingham, WA: Escola de Engenharia de São Carlos, Universidade de São Paulo. . Acesso em: 26 ago. 2024. , 2004APA
Gonçalves Neto, L., Cirino, G. A., Mansano, R. D., Verdonck, P. B., & Seabra, A. C. (2004). Design of continuous full complex modulation proximity printing masks using a quadratic phase distribution. Proceedings of SPIE. Bellingham, WA: Escola de Engenharia de São Carlos, Universidade de São Paulo.NLM
Gonçalves Neto L, Cirino GA, Mansano RD, Verdonck PB, Seabra AC. Design of continuous full complex modulation proximity printing masks using a quadratic phase distribution. Proceedings of SPIE. 2004 ; 5437 71-78.[citado 2024 ago. 26 ]Vancouver
Gonçalves Neto L, Cirino GA, Mansano RD, Verdonck PB, Seabra AC. Design of continuous full complex modulation proximity printing masks using a quadratic phase distribution. Proceedings of SPIE. 2004 ; 5437 71-78.[citado 2024 ago. 26 ]