Monte Carlo simulation of doping by ion implantation into a-SIC:H (2001)
Fonte: SBMicro 2001: proceedings. Nome do evento: International Conference on Microelectronics and Packaging. Unidade: EP
Assunto: CIRCUITOS INTEGRADOS
ABNT
OLIVEIRA, A. R. e PEREYRA, Inés e PÁEZ CARREÑO, Marcelo Nelson. Monte Carlo simulation of doping by ion implantation into a-SIC:H. 2001, Anais.. Brasília: SBMicro, 2001. . Acesso em: 07 nov. 2024.APA
Oliveira, A. R., Pereyra, I., & Páez Carreño, M. N. (2001). Monte Carlo simulation of doping by ion implantation into a-SIC:H. In SBMicro 2001: proceedings. Brasília: SBMicro.NLM
Oliveira AR, Pereyra I, Páez Carreño MN. Monte Carlo simulation of doping by ion implantation into a-SIC:H. SBMicro 2001: proceedings. 2001 ;[citado 2024 nov. 07 ]Vancouver
Oliveira AR, Pereyra I, Páez Carreño MN. Monte Carlo simulation of doping by ion implantation into a-SIC:H. SBMicro 2001: proceedings. 2001 ;[citado 2024 nov. 07 ]