Performance characterization of an RIE reactor with built-in RF excitation antenna (2000)
Source: Solid-State Devices and Circuits. Unidade: EP
Assunto: ANTENAS
ABNT
MASSI, Marcos et al. Performance characterization of an RIE reactor with built-in RF excitation antenna. Solid-State Devices and Circuits, v. 8, n. 1, p. 1-4, 2000Tradução . . Acesso em: 17 out. 2024.APA
Massi, M., Mansano, R. D., Verdonck, P. B., Maciel, H. S., Cirino, G. A., Castro, R. M. de, & Pisani, M. B. (2000). Performance characterization of an RIE reactor with built-in RF excitation antenna. Solid-State Devices and Circuits, 8( 1), 1-4.NLM
Massi M, Mansano RD, Verdonck PB, Maciel HS, Cirino GA, Castro RM de, Pisani MB. Performance characterization of an RIE reactor with built-in RF excitation antenna. Solid-State Devices and Circuits. 2000 ; 8( 1): 1-4.[citado 2024 out. 17 ]Vancouver
Massi M, Mansano RD, Verdonck PB, Maciel HS, Cirino GA, Castro RM de, Pisani MB. Performance characterization of an RIE reactor with built-in RF excitation antenna. Solid-State Devices and Circuits. 2000 ; 8( 1): 1-4.[citado 2024 out. 17 ]