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Filtros : "CIRCUITOS INTEGRADOS" "Microelectronic Engineering" "EP" Removidos: "Universidade Federal de Santa Catarina (UFSC)" "FM-MFT" "SANTOS, EDUARDO TOLEDO" "Argentina" Limpar

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  • Artigo de periodico

    Reactive ion etching and plasma etching of tungsten (1993)

    Verdonck, Patrick Bernard; Brasseur, G.; Swart, J.

    Source: Microelectronic Engineering. Unidade: EP

    Assunto: CIRCUITOS INTEGRADOS

    Acesso à fonteDOIHow to cite
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    • ABNT

      VERDONCK, Patrick Bernard e BRASSEUR, G. e SWART, J. Reactive ion etching and plasma etching of tungsten. Microelectronic Engineering, v. 21, p. 329-332, 1993Tradução . . Disponível em: https://doi.org/10.1016/0167-9317(93)90084-i. Acesso em: 12 nov. 2024.

    • APA

      Verdonck, P. B., Brasseur, G., & Swart, J. (1993). Reactive ion etching and plasma etching of tungsten. Microelectronic Engineering, 21, 329-332. doi:10.1016/0167-9317(93)90084-i

    • NLM

      Verdonck PB, Brasseur G, Swart J. Reactive ion etching and plasma etching of tungsten [Internet]. Microelectronic Engineering. 1993 ; 21 329-332.[citado 2024 nov. 12 ] Available from: https://doi.org/10.1016/0167-9317(93)90084-i

    • Vancouver

      Verdonck PB, Brasseur G, Swart J. Reactive ion etching and plasma etching of tungsten [Internet]. Microelectronic Engineering. 1993 ; 21 329-332.[citado 2024 nov. 12 ] Available from: https://doi.org/10.1016/0167-9317(93)90084-i

  • Artigo de periodico

    Laser enhanced polymer etching in different ambients (1989)

    Verdonck, Patrick Bernard; Brasseur, G.; Coopmans, F.

    Source: Microelectronic Engineering. Unidade: EP

    Assunto: CIRCUITOS INTEGRADOS

    Acesso à fonteDOIHow to cite
    A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas

    • ABNT

      VERDONCK, Patrick Bernard e BRASSEUR, G. e COOPMANS, F. Laser enhanced polymer etching in different ambients. Microelectronic Engineering, v. 9, p. 507-510, 1989Tradução . . Disponível em: https://doi.org/10.1016/0167-9317(89)90111-1. Acesso em: 12 nov. 2024.

    • APA

      Verdonck, P. B., Brasseur, G., & Coopmans, F. (1989). Laser enhanced polymer etching in different ambients. Microelectronic Engineering, 9, 507-510. doi:10.1016/0167-9317(89)90111-1

    • NLM

      Verdonck PB, Brasseur G, Coopmans F. Laser enhanced polymer etching in different ambients [Internet]. Microelectronic Engineering. 1989 ; 9 507-510.[citado 2024 nov. 12 ] Available from: https://doi.org/10.1016/0167-9317(89)90111-1

    • Vancouver

      Verdonck PB, Brasseur G, Coopmans F. Laser enhanced polymer etching in different ambients [Internet]. Microelectronic Engineering. 1989 ; 9 507-510.[citado 2024 nov. 12 ] Available from: https://doi.org/10.1016/0167-9317(89)90111-1
  • 1

1 - 2 (2 records)

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