Innovative low temperature plasma approach for deposition of alumina films (2014)
- Authors:
- USP affiliated authors: SILVA, TIAGO FIORINI DA - IF ; TABACNIKS, MANFREDO HARRI - IF
- Unidade: IF
- DOI: 10.1590/1516-1439.283514
- Subjects: FÍSICA NUCLEAR; MATERIAIS; FÍSICA DE PLASMAS; ALUMÍNIO
- Keywords: alumina; aluminum acetylacetonate; reactive plasma sputtering; composition; structure; morphology
- Agências de fomento:
- Language: Inglês
- Imprenta:
- Publisher place: São Carlos
- Date published: 2014
- Source:
- Título: Materials Research
- ISSN: 1516-1439
- Volume/Número/Paginação/Ano: v. 17, n. 6, p. 1410-1419, novembro 2014
- Este periódico é de acesso aberto
- Este artigo é de acesso aberto
- URL de acesso aberto
- Cor do Acesso Aberto: gold
- Licença: cc-by
-
ABNT
BATTAGLIN, Felipe Augusto Darriba et al. Innovative low temperature plasma approach for deposition of alumina films. Materials Research, v. 17, n. 6, p. 1410-1419, 2014Tradução . . Disponível em: https://doi.org/10.1590/1516-1439.283514. Acesso em: 29 dez. 2025. -
APA
Battaglin, F. A. D., Hosokawa, R. S., Cruz, N. C. da, Caseli, L., Rangel, E. C., Silva, T. F. da, & Tabacniks, M. H. (2014). Innovative low temperature plasma approach for deposition of alumina films. Materials Research, 17( 6), 1410-1419. doi:10.1590/1516-1439.283514 -
NLM
Battaglin FAD, Hosokawa RS, Cruz NC da, Caseli L, Rangel EC, Silva TF da, Tabacniks MH. Innovative low temperature plasma approach for deposition of alumina films [Internet]. Materials Research. 2014 ; 17( 6): 1410-1419.[citado 2025 dez. 29 ] Available from: https://doi.org/10.1590/1516-1439.283514 -
Vancouver
Battaglin FAD, Hosokawa RS, Cruz NC da, Caseli L, Rangel EC, Silva TF da, Tabacniks MH. Innovative low temperature plasma approach for deposition of alumina films [Internet]. Materials Research. 2014 ; 17( 6): 1410-1419.[citado 2025 dez. 29 ] Available from: https://doi.org/10.1590/1516-1439.283514 - RBS analysis of anodized porous films
- Unveiling the origin of photoluminescence in nanoporous anodic alumina (NAA) obtained by constant current regime
- Efficient computational modeling of electronic stopping power of organic polymers for proton therapy optimization
- Films deposited from reactive sputtering of aluminum acetylacetonate under low energy ion bombardment
- Influence of the hydrogen content on the optical properties of TiOx thin films
- News from the LAMFI
- Production and characterization of a nitrogen-implanted 'FE' standard to calibrate PIGE measurements
- Production and characterization of a nitrogen-implanted Fe standard to calibrate PIGE measurements
- Bias and synergy in the self-consistent approach of data analysis of ion beam techniques
- Processing of massive rutherford back-scattering spectrometry data by artificial neural networks
Informações sobre o DOI: 10.1590/1516-1439.283514 (Fonte: oaDOI API)
Download do texto completo
| Tipo | Nome | Link | |
|---|---|---|---|
 |
SciELO - Brasil - Innovat... | Direct link |
How to cite
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
