Study of power balance in electronegative capacitively coupled plasmas (2003)
Fonte: Microelectronic Technology and Devices SBMicro 2003. Nome do evento: International Symposium on Microelectronics Technology and Devices - SBMICRO. Unidade: EP
Assunto: PLASMA (MICROELETRÔNICA)
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ABNT
SWART, Laura e VERDONCK, Patrick Bernard e MOSHKALYOV, Stanislav A. Study of power balance in electronegative capacitively coupled plasmas. 2003, Anais.. Pennington: The Electrochemical Society, 2003. . Acesso em: 16 nov. 2025.APA
Swart, L., Verdonck, P. B., & Moshkalyov, S. A. (2003). Study of power balance in electronegative capacitively coupled plasmas. In Microelectronic Technology and Devices SBMicro 2003. Pennington: The Electrochemical Society.NLM
Swart L, Verdonck PB, Moshkalyov SA. Study of power balance in electronegative capacitively coupled plasmas. Microelectronic Technology and Devices SBMicro 2003. 2003 ;[citado 2025 nov. 16 ]Vancouver
Swart L, Verdonck PB, Moshkalyov SA. Study of power balance in electronegative capacitively coupled plasmas. Microelectronic Technology and Devices SBMicro 2003. 2003 ;[citado 2025 nov. 16 ]
