Thermally actuated MEMS all based on PECVD materials obtained at low temperature (2005)
Paez Carreño, Marcelo Nelson 
; Rehder, Gustavo Pamplona
Source: Microelectronics Technology and Devices SBMICRO 2005. Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO. Unidade: EP
Assunto: MICROELETRÔNICA
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PAEZ CARREÑO, Marcelo Nelson e REHDER, Gustavo Pamplona. Thermally actuated MEMS all based on PECVD materials obtained at low temperature. 2005, Anais.. Pennington: The Electrochemical Society, 2005. . Acesso em: 15 nov. 2025.APA
Paez Carreño, M. N., & Rehder, G. P. (2005). Thermally actuated MEMS all based on PECVD materials obtained at low temperature. In Microelectronics Technology and Devices SBMICRO 2005. Pennington: The Electrochemical Society.NLM
Paez Carreño MN, Rehder GP. Thermally actuated MEMS all based on PECVD materials obtained at low temperature. Microelectronics Technology and Devices SBMICRO 2005. 2005 ;[citado 2025 nov. 15 ]Vancouver
Paez Carreño MN, Rehder GP. Thermally actuated MEMS all based on PECVD materials obtained at low temperature. Microelectronics Technology and Devices SBMICRO 2005. 2005 ;[citado 2025 nov. 15 ]
