Determination of the ion density and electron temperature using a planar electrostatic probe (2005)
Source: Microelectronics Technology and Devices SBMICRO 2005. Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO. Unidade: EP
Assunto: MICROELETRÔNICA
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SWART, Laura e VERDONCK, Patrick Bernard. Determination of the ion density and electron temperature using a planar electrostatic probe. 2005, Anais.. Pennington: The Electrochemical Society, 2005. . Acesso em: 17 nov. 2025.APA
Swart, L., & Verdonck, P. B. (2005). Determination of the ion density and electron temperature using a planar electrostatic probe. In Microelectronics Technology and Devices SBMICRO 2005. Pennington: The Electrochemical Society.NLM
Swart L, Verdonck PB. Determination of the ion density and electron temperature using a planar electrostatic probe. Microelectronics Technology and Devices SBMICRO 2005. 2005 ;[citado 2025 nov. 17 ]Vancouver
Swart L, Verdonck PB. Determination of the ion density and electron temperature using a planar electrostatic probe. Microelectronics Technology and Devices SBMICRO 2005. 2005 ;[citado 2025 nov. 17 ]
