Influence of RF frequency on production of adsorbent organic films by PECVD (2003)
Nascimento Filho, Antonio Pereira do; Hamanaka, Cristian Otsuka; Jesus, Dosil Pereira de; Silva, Maria Lucia Pereira da; Demarquette, Nicole Raymonde 
Source: Microelectronic Technology and Devices SBMicro 2003. Unidade: EP
Assunto: MICROELETRÔNICA
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NASCIMENTO FILHO, Antonio Pereira do et al. Influence of RF frequency on production of adsorbent organic films by PECVD. Microelectronic Technology and Devices SBMicro 2003. Tradução . Pennington: Electrochemical Society, 2003. . Disponível em: https://repositorio.usp.br/directbitstream/1a91733e-6df9-42ae-8d53-c8ca7c43befe/DEMARQUETTE-2003-Influence_of_RF_frequency.pdf. Acesso em: 16 nov. 2025.APA
Nascimento Filho, A. P. do, Hamanaka, C. O., Jesus, D. P. de, Silva, M. L. P. da, & Demarquette, N. R. (2003). Influence of RF frequency on production of adsorbent organic films by PECVD. In Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society. Recuperado de https://repositorio.usp.br/directbitstream/1a91733e-6df9-42ae-8d53-c8ca7c43befe/DEMARQUETTE-2003-Influence_of_RF_frequency.pdfNLM
Nascimento Filho AP do, Hamanaka CO, Jesus DP de, Silva MLP da, Demarquette NR. Influence of RF frequency on production of adsorbent organic films by PECVD [Internet]. In: Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society; 2003. [citado 2025 nov. 16 ] Available from: https://repositorio.usp.br/directbitstream/1a91733e-6df9-42ae-8d53-c8ca7c43befe/DEMARQUETTE-2003-Influence_of_RF_frequency.pdfVancouver
Nascimento Filho AP do, Hamanaka CO, Jesus DP de, Silva MLP da, Demarquette NR. Influence of RF frequency on production of adsorbent organic films by PECVD [Internet]. In: Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society; 2003. [citado 2025 nov. 16 ] Available from: https://repositorio.usp.br/directbitstream/1a91733e-6df9-42ae-8d53-c8ca7c43befe/DEMARQUETTE-2003-Influence_of_RF_frequency.pdf
