Influence of RF frequency on production of adsorbent organic films by PECVD (2003)
- Authors:
- USP affiliated authors: SILVA, MARIA LUCIA PEREIRA DA - EP ; DEMARQUETTE, NICOLE RAYMONDE - EP
- Unidade: EP
- Assunto: MICROELETRÔNICA
- Language: Inglês
- Imprenta:
- Publisher: Electrochemical Society
- Publisher place: Pennington
- Date published: 2003
- Source:
- Título do periódico: Microelectronic Technology and Devices SBMicro 2003
-
ABNT
NASCIMENTO FILHO, Antonio Pereira do; SILVA, Maria Lucia Pereira da; DEMARQUETTE, Nicole Raymonde; HAMANAKA, Cristian Otsuka; JESUS, Dosil Pereira de. Influence of RF frequency on production of adsorbent organic films by PECVD. In: Microelectronic Technology and Devices SBMicro 2003[S.l: s.n.], 2003. -
APA
Nascimento Filho, A. P. do, Silva, M. L. P. da, Demarquette, N. R., Hamanaka, C. O., & Jesus, D. P. de. (2003). Influence of RF frequency on production of adsorbent organic films by PECVD. In Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society. -
NLM
Nascimento Filho AP do, Silva MLP da, Demarquette NR, Hamanaka CO, Jesus DP de. Influence of RF frequency on production of adsorbent organic films by PECVD. In: Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society; 2003. -
Vancouver
Nascimento Filho AP do, Silva MLP da, Demarquette NR, Hamanaka CO, Jesus DP de. Influence of RF frequency on production of adsorbent organic films by PECVD. In: Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society; 2003. - Utilizações de filmes poliméricos de teos
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