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Filtros : "Microelectronic Technology and Devices SBMicro 2003" "PLASMA (MICROELETRÔNICA)" Limpar

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    Study of power balance in electronegative capacitively coupled plasmas (2003)

    Swart, Laura; Verdonck, Patrick Bernard; Moshkalyov, Stanislav A

    Fonte: Microelectronic Technology and Devices SBMicro 2003. Nome do evento: International Symposium on Microelectronics Technology and Devices - SBMICRO. Unidade: EP

    Assunto: PLASMA (MICROELETRÔNICA)

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    • ABNT

      SWART, Laura e VERDONCK, Patrick Bernard e MOSHKALYOV, Stanislav A. Study of power balance in electronegative capacitively coupled plasmas. 2003, Anais.. Pennington: The Electrochemical Society, 2003. . Acesso em: 16 nov. 2025.

    • APA

      Swart, L., Verdonck, P. B., & Moshkalyov, S. A. (2003). Study of power balance in electronegative capacitively coupled plasmas. In Microelectronic Technology and Devices SBMicro 2003. Pennington: The Electrochemical Society.

    • NLM

      Swart L, Verdonck PB, Moshkalyov SA. Study of power balance in electronegative capacitively coupled plasmas. Microelectronic Technology and Devices SBMicro 2003. 2003 ;[citado 2025 nov. 16 ]

    • Vancouver

      Swart L, Verdonck PB, Moshkalyov SA. Study of power balance in electronegative capacitively coupled plasmas. Microelectronic Technology and Devices SBMicro 2003. 2003 ;[citado 2025 nov. 16 ]

  • Parte de monografia/livro

    Plasma polymerized ethyl ether for obtaining thin films for sensor development (2003)

    Lima, Roberto da Rocha; Carvalho, Rodrigo Amorim Motta; Silva, Maria Lucia Pereira da; Demarquette, Nicole Raymonde

    Fonte: Microelectronic Technology and Devices SBMicro 2003. Unidades: IF, EP

    Assuntos: MICROELETRÔNICA, PLASMA (MICROELETRÔNICA)

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    • ABNT

      LIMA, Roberto da Rocha et al. Plasma polymerized ethyl ether for obtaining thin films for sensor development. Microelectronic Technology and Devices SBMicro 2003. Tradução . Pennington: Electrochemical Society, 2003. . Disponível em: https://repositorio.usp.br/directbitstream/e3555168-1816-4a1e-a0b8-3ae37193e647/DEMARQUETTE-2003-Plasma_polymerized_ethyl.pdf. Acesso em: 16 nov. 2025.

    • APA

      Lima, R. da R., Carvalho, R. A. M., Silva, M. L. P. da, & Demarquette, N. R. (2003). Plasma polymerized ethyl ether for obtaining thin films for sensor development. In Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society. Recuperado de https://repositorio.usp.br/directbitstream/e3555168-1816-4a1e-a0b8-3ae37193e647/DEMARQUETTE-2003-Plasma_polymerized_ethyl.pdf

    • NLM

      Lima R da R, Carvalho RAM, Silva MLP da, Demarquette NR. Plasma polymerized ethyl ether for obtaining thin films for sensor development [Internet]. In: Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society; 2003. [citado 2025 nov. 16 ] Available from: https://repositorio.usp.br/directbitstream/e3555168-1816-4a1e-a0b8-3ae37193e647/DEMARQUETTE-2003-Plasma_polymerized_ethyl.pdf

    • Vancouver

      Lima R da R, Carvalho RAM, Silva MLP da, Demarquette NR. Plasma polymerized ethyl ether for obtaining thin films for sensor development [Internet]. In: Microelectronic Technology and Devices SBMicro 2003. Pennington: Electrochemical Society; 2003. [citado 2025 nov. 16 ] Available from: https://repositorio.usp.br/directbitstream/e3555168-1816-4a1e-a0b8-3ae37193e647/DEMARQUETTE-2003-Plasma_polymerized_ethyl.pdf
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