Formation of 3C-SIC films on silicon by thermal annealing process (2004)
Oliveira, Alessandro Ricardo de; Paez Carreño, Marcelo Nelson 
Fonte: Microelectronics technology and devices SBMicro 2004. Proceedings, v. 2004-03. Nome do evento: International Symposium on Microelectronics Technology and Devices SBMICRO. Unidade: EP
Assuntos: MICROELETRÔNICA, FILMES FINOS
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
ABNT
OLIVEIRA, Alessandro Ricardo de e PAEZ CARREÑO, Marcelo Nelson. Formation of 3C-SIC films on silicon by thermal annealing process. 2004, Anais.. Pennington: The Electrochemical Society, 2004. . Acesso em: 15 nov. 2025.APA
Oliveira, A. R. de, & Paez Carreño, M. N. (2004). Formation of 3C-SIC films on silicon by thermal annealing process. In Microelectronics technology and devices SBMicro 2004. Proceedings, v. 2004-03. Pennington: The Electrochemical Society.NLM
Oliveira AR de, Paez Carreño MN. Formation of 3C-SIC films on silicon by thermal annealing process. Microelectronics technology and devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;[citado 2025 nov. 15 ]Vancouver
Oliveira AR de, Paez Carreño MN. Formation of 3C-SIC films on silicon by thermal annealing process. Microelectronics technology and devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;[citado 2025 nov. 15 ]
