Laser enhanced polymer etching in different ambients (1989)
Fonte: Microelectronic Engineering. Unidade: EP
Assunto: CIRCUITOS INTEGRADOS
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ABNT
VERDONCK, Patrick Bernard e BRASSEUR, G. e COOPMANS, F. Laser enhanced polymer etching in different ambients. Microelectronic Engineering, v. 9, p. 507-510, 1989Tradução . . Disponível em: https://doi.org/10.1016/0167-9317(89)90111-1. Acesso em: 16 nov. 2025.APA
Verdonck, P. B., Brasseur, G., & Coopmans, F. (1989). Laser enhanced polymer etching in different ambients. Microelectronic Engineering, 9, 507-510. doi:10.1016/0167-9317(89)90111-1NLM
Verdonck PB, Brasseur G, Coopmans F. Laser enhanced polymer etching in different ambients [Internet]. Microelectronic Engineering. 1989 ; 9 507-510.[citado 2025 nov. 16 ] Available from: https://doi.org/10.1016/0167-9317(89)90111-1Vancouver
Verdonck PB, Brasseur G, Coopmans F. Laser enhanced polymer etching in different ambients [Internet]. Microelectronic Engineering. 1989 ; 9 507-510.[citado 2025 nov. 16 ] Available from: https://doi.org/10.1016/0167-9317(89)90111-1
