Plasma parameters obtained with planar probe and optical emission spectroscopy (2007)
Source: Journal of Integrated Circuits and Systems. Unidade: EP
Subjects: MICROELETRÔNICA, CIÊNCIA DA COMPUTAÇÃO
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DALTRINI, Andre M et al. Plasma parameters obtained with planar probe and optical emission spectroscopy. Journal of Integrated Circuits and Systems, v. 2, n. 2, 2007Tradução . . Acesso em: 15 nov. 2025.APA
Daltrini, A. M., Moshkalev, S., Swart, L., & Verdonck, P. B. (2007). Plasma parameters obtained with planar probe and optical emission spectroscopy. Journal of Integrated Circuits and Systems, 2( 2).NLM
Daltrini AM, Moshkalev S, Swart L, Verdonck PB. Plasma parameters obtained with planar probe and optical emission spectroscopy. Journal of Integrated Circuits and Systems. 2007 ; 2( 2):[citado 2025 nov. 15 ]Vancouver
Daltrini AM, Moshkalev S, Swart L, Verdonck PB. Plasma parameters obtained with planar probe and optical emission spectroscopy. Journal of Integrated Circuits and Systems. 2007 ; 2( 2):[citado 2025 nov. 15 ]
